Can anyone recommend a general book on etch recipies for RIE, plasma, and/or
wet chemical?
Justin.
Justin D. Mansell | "If your opponent strikes with fire,
Ginzton Laboratory | counter with water."
Stanford, CA 94305 | "A true warrior is invincible because
tel: 415-725-2266 | he contests with nothing."
fax: 415-723-2666 | "To injure an opponent is to injure
yourself."
http://www.stanford.edu/~jmansell| -Morihei Ueshiba