Hello,
For the growth of (002) AlN film by sputtering, you should try something like
these:
- 7watt/cm2 of target area
- 5cm between the target and the substrates
- a pressure as low as possible
- in pure nitrogene.
and a good backgroung vacuum
That's a good starting point.
Regards,
Vincent Mortet.
Quoting Priyanka Aggarwal :
> Hi,
>
> I was wondering if someone can tell me the conditions required to grown
> right crystal structure of a Piezoelectric material namely AlN. Also some
> equipment/method to sense the voltage in the range of 900 V.
>
> Thanks for your time
> Regards,
> Priyanka
>
> ----- Original Message -----
> From: "Vincent Mortet"
> To:
> Sent: Thursday, October 24, 2002 11:48 PM
> Subject: RE: [mems-talk] Piezoelectricity Measurement
>
>
> > Hi,
> >
> > I've not experience with this configuration. However I 'd like to prepare
> > such cantilever with a piezoelectric layer and electrodes to measure the
> > d31. According to me, you should have a look on refs // E Cattan et al,
> > Sensors and Actuators 74 (1999) 60 and // B Jaber et al, Sensors and
> > Actuators A 63 (1997) 91, were a measurment of e31 with a cantilever is
> > described.
> >
> > Best regards,
> > Vincent Mortet
> >
> > -----Original Message-----
> > From: [email protected] [mailto:[email protected]]On
> > Behalf Of Priyanka Aggarwal
> > Sent: donderdag 24 oktober 2002 19:12
> > To: [email protected]
> > Subject: Re: [mems-talk] Piezoelectricity Measurement
> >
> >
> > Hi,
> > I am also working on the same lines. I was wondering where should I have
> the
> > metal contacts,I want to have them on the fixed end of the cantilever ,
> but
> > I am not sure how to make metal contacts till that surface. CAn you
> suggest
> > something.I am attching a document to make it clearer.
> > Thanks
> > Priyanka
> >
> >
> >
> >
> >
> > ----- Original Message -----
> > From: "Vincent Mortet"
> > To:
> > Sent: Thursday, October 24, 2002 2:59 AM
> > Subject: RE: [mems-talk] Piezoelectricity Measurement
> >
> >
> > > Hello,
> > >
> > > 1/To measure the reverse piezoelectric coeffience d33 of "a layer" you
> > have
> > > to make a sandwich of it, between two elctectods on a thick substrate
> > (2mm)
> > > you can apply a AC voltage (frequency f0) to the layer and you measure
> the
> > > displasment of the top surface with a calibrated AFM or interferometer.
> > For
> > > the AFM method, you have to use the A-B signal from the photodetector
> with
> > > the frequency f0, ie filtered with an lock-in amplifier.
> > >
> > > 2/It exists a methode to measure the direct piezoelectric coefficient
> e31
> > > on which you collect the charges created by the piezo on the electrode
> > > during the vibration on a cantilever covered with the piezoelectric
> > > material.
> > >
> > > Here are some refs to help you on points 1/ A-L Kholin et al. Rev Sci
> > > Instrum Vol 67 No 5 May 1996 1935
> > > M-A Dubois et al, Appl Phys Lett, Vol 89, No 11 (2001) 6389
> > > C-M Lueng et al J Appl Phys, Vol 88, No 9 (2000) 5360
> > > J-A Christman et al App Phys Lett, Vol73, No 26 (1998) 3851
> > >
> > > 2/ E Cattan et al, Sensors and Actuators 74 (1999) 60
> > > B Jaber et al, Sensors and Actuators A 63 (1997) 91
> > > J-F Shepard Jr et al, Sensors and Actuators A 71 (1998) 133
> > >
> > > Best regards,
> > > Vincent Mortet
> > >
> > > -----Original Message-----
> > > From: [email protected]
> [mailto:[email protected]]On
> > > Behalf Of Xiaoqin Huang
> > > Sent: woensdag 23 oktober 2002 19:56
> > > To: [email protected]
> > > Subject: [mems-talk] Piezoelectricity Measurement
> > >
> > >
> > > Hi all,
> > >
> > > I am planning to measure the piezoelectricity of ZnO, but I just know a
> > > bit about this kind of measurement. If you are familiar with this
> > > measurement, please give me some suggestions. Thank you very much.
> > >
> > > Jenny X. Huang
> > >
> > >
> > >
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> >
> >
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>
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