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MEMSnet Home: MEMS-Talk: Re: Wet Si etchant not attack Al and/or SiO2
Re: Wet Si etchant not attack Al and/or SiO2
2003-02-27
HE,Han-Johnny
2003-02-28
David Springer
Re: Wet Si etchant not attack Al and/or SiO2
HE,Han-Johnny
2003-02-27
Sunil,
Thanks a lot.
But I am wondering some Si Etchant(eg. KOH, TMAH) which will not attack SiO2 and
Al. Sorry about the confusing.
Johnny


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