Dear colleagues,

A basic question. How did you align the mask along the crystalline
direction, i.e., <110> on the wafer? Right now we only have the way to align
a straight in mask with the primary flat. Any more precise way?

Second, anybody knows precisely how long is the primary flat of a n-type or
p-type 3 inch 100 wafer?

Thanks a lot,

Hongjun Zeng, PhD
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465