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MEMSnet Home: MEMS-Talk: How to easily control the thickness of SU-8 coating?
How to easily control the thickness of SU-8 coating?
2003-02-27
Kailiang Wang
How to easily control the thickness of SU-8 coating?
Kailiang Wang
2003-02-27
Hi, everyone here.
I plan to coat some pieces of metal plates with SU-8. I hope to get a dense
layer with thickness in micron scale. A spinner with 3000 rms is available, but
the coating is too thin.  I try to dip the plates into SU-8 solutions for some
time, then dry it naturally. But I don't know the exact theoretical relation or
experimental curve between dipping time and thickness. Is anyone with similar
experience willing to give me some suggestions or more smart methods?
Thank you so much if you could reply me at kawang@me.rochester.edu.
reply
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