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MEMSnet Home: MEMS-Talk: RE: +AFs-mems-talk+AF0- Any Cr Etchant, Ti Etchant, Mo Etchant no t attack Al
RE: +AFs-mems-talk+AF0- Any Cr Etchant, Ti Etchant, Mo Etchant no t attack Al
2003-03-04
kirt_williams@agilent.com
RE: +AFs-mems-talk+AF0- Any Cr Etchant, Ti Etchant, Mo Etchant no t attack Al
kirt_williams@agilent.com
2003-03-04
> Just wondering any Cr Etchant or Ti Etchant or Mo Etchant
> which will not attack Al.
> Thanks.
> Johnny

CR-14 from Transene for etching Cr will not attack Al.
CR-7, also for Cr, will etch Al.

If the Ti or Mo etchant has HF in it, it will attack Al.

        --Kirt Williams Agilent Technologies

> Just wondering any Cr Etchant or Ti Etchant or Mo Etchant
> which will not attack Al.
> Thanks.
> Johnny

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