Thanks for the responses. I've gathered reading some of the recent posts
about spin on materials that some of them result in Parylene-like materials
after processing.
What I was hoping to find out, however, was if there had been any work done
to try and incorporate a UV sensitive, dissolution promoter into the
Parylene as deposited using the vacuum technique?
I realize this may not be possible if the Parylene is completely
cross-linked as it is deposited, but thought I'd ask anyway. The resulting
system would be similar to what you would get by electroplating photoresist,
but without the wet processing, i.e. a completely conformal photosensitive
polymer coating.
Thanks again. --Steve