A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RIE Etching of Ni
RIE Etching of Ni
2003-03-08
garber@engr.uconn.edu
RIE Etching of Ni
garber@engr.uconn.edu
2003-03-08
Greetings,

Is there a chemistry for RIE dry etching Ni?
I only need to go through 200A and then I hit a W layer I etch with SF6.

Thank You

Brent Garber

--------------------------------------------------------------------
mail2web - Check your email from the web at
http://mail2web.com/ .



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
MEMS Technology Review
The Branford Group
Harrick Plasma, Inc.