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MEMSnet Home: MEMS-Talk: Deposition of Au into a microchannel
Deposition of Au into a microchannel
2003-03-10
zoin@mit.edu
2003-03-12
Likun Zhu
2003-03-11
Roger Shile
2003-03-11
kirt_williams@agilent.com
Deposition of Au into a microchannel
zoin@mit.edu
2003-03-10
Hi all,

I am trying to deposit Au layer on the surface of a microchannel, both the
walls and the bottom.  However, by evaporation the gold only deposits at the
bottom surface;  the walls of the channel are not covered.  I am wondering if
someone has experience solving this problem.

Thanks alot!

Zhiyu


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