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MEMSnet Home: MEMS-Talk: mask material for wet etch glass
mask material for wet etch glass
2003-03-11
Zhimin J Yao
2003-03-12
Roger Shile
2003-03-12
BobHendu@aol.com
mask material for wet etch glass
Zhimin J Yao
2003-03-11
Hi,

We are trying to etch about 0.5 - 1mm deep into glass or quartz using a
metal mask.  Au did not work well because the adhesion layer got etched.
Does anybody know what metal works the best?  Anybody tried W?

Thanks,
Z. Jamie Yao


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