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MEMSnet Home: MEMS-Talk: air gap breakdown
air gap breakdown
2003-03-14
Tom Hodge
2003-03-17
Ertl, Stephan
2003-03-17
Michael D Martin
air gap breakdown
Tom Hodge
2003-03-14
Hi All,
Does anyone have experience with electrical breakdown of narrow air gaps
(several microns) between silicon electrodes ? My experience is that the
breakdown voltage strongly depends on contamination of these narrow trenches
and would like to find out more information.

Regards,
Tom H. Hodge
Capella Photonics Inc.
19 Great Oaks Blvd Suite 20
San Jose, Ca. 95119
Ph 408-360-4257
Fax 408-225-6248
email thodge@capellaphotonics.com
www.capellaphotonics.com


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