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MEMSnet Home: MEMS-Talk: RE: Overlay between front and back of wafer
RE: Overlay between front and back of wafer
2003-03-20
Runkel, Frank
RE: Overlay between front and back of wafer
Runkel, Frank
2003-03-20
Hello Mark,

SUSS MicroTec is offering easy-to-use Front to Backside Measurement Tools.
Please visit our web site at http://www.suss.com or contact me directly if
you are interested in details how the measurement is done.

Best Regards,

Frank.

--------------------------------------------
SUSS MicroTec
Applications Center Europe
Frank Runkel
Schleissheimer Str. 90
85748 Garching
Germany
Fon     +49 89 32007 - 302
Fax     +49 89 32007 - 390
email   f.runkel@suss.de





> ------------------------------
>
> Message: 4
> Date: Wed, 19 Mar 2003 13:31:56 +0000
> From: "Mark van der Heijden" 
> Subject: [mems-talk] Overlay between front and back of wafer
> To: mems-talk@memsnet.org
> Message-ID: 
> Content-Type: text/plain; charset=iso-8859-1; format=flowed
>
>
> Hi All,
>
> Does anyone know of a method/device to measure which i can use to measure
> the overlay between structures on the front and the back of a wafer.
>
> Thanks,
> Mark
>
>
>
>
> _________________________________________________________________
>
>
>

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