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MEMSnet Home: MEMS-Talk: AlN for piezoelectric device
AlN for piezoelectric device
2003-03-27
chris menzel
2003-03-28
Robert Okojie
AlN for piezoelectric device
chris menzel
2003-03-27
Hello,

I'm interested in learning more about the processing mechanics of AlN. I'm
evaluating it for use as piezoelectric sensing/actuating devices. Specifics of
what I'm interested in are; 1)who supplies wafers of Si/AlN?, 2)What are the
constraints of integration with CMOS fabrication,3)comprehensive materials
parameter spec sheet.

Thanks for your help!

Chris



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