Hi,
Maybe the only feasible way to etch through Pyrex (i supposed 500um
thickness)is to deposit LPCVD amorphous silicon 400nm& PECVD SiC 500nm.
These double layer mask can etch deep trench and through holes on pyrex
glass. The etchant is HF(5%) & H3PO4(70%. the wafer is safe nearly 10 hurs
in solutions.

good luckly.
Dlee
Mechanical Engineering Department
The Univeristy of Texas At Austin





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