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MEMSnet Home: MEMS-Talk: PMMA Liftoff
PMMA Liftoff
2003-04-17
Dave Kharas
PMMA Liftoff
Dave Kharas
2003-04-17
I used to spincast PMMA thin films from
Toluene solutions, so you could defintly
use Toluene as a lift off solvent.


Dave Kharas Ph.D.
Sarcon Microsystems


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