Hi Yilei,

Maybe AZ1518 OR AZ4620 will work for you

Jessica

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Yilei
Sent: Wednesday, April 16, 2003 9:03 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] resist with good thermal stability


Hi member,
Can anyone recommend certain resist with good thermal stability that can be
used to deposit thin film using PECVD? And more, it can be easily removed
with
selection on silicon and silicon dioxide at the same time. Thanks a lot.

Regards,
Yilei








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