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  • Question: origin of the term "MEMS" (Xuming Zhang) (Zhang Xuming)
  • guidance required (mahdi bagheri)
  • AC voltage (vishwa)
  • Silicon-glass anodic bonding (Hell, Erwin)
  • Inducing air flow (Noel Cherowbrier)
  • BSOI wafers needed (sandra)
  • guidance required (om)
  • sir regarding an under water comm.system (srkvadali)
  • Etch rate of Cu in BHF (Frank Rasmussen)
  • looking for PNN-PZT etchant (choe)
  • BSOI wafers needed (Lawlor, Chris)
  • RE: origin of the term "MEMS" (John Maloney)
  • BCB dulition (Michael Töpper)
  • Etch rate of Cu in BHF (Kirt & Erika Zipf-Williams)
  • Silicon-glass anodic bonding (BRAD JOHNSON)
  • BSOI wafers needed (Kenneth Smith)
  • Si3N4 Dry etch with good selectivity (Jun Chen)
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