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MEMS-Talk
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Question: origin of the term "MEMS" (Xuming Zhang) (Zhang Xuming)
guidance required (mahdi bagheri)
AC voltage (vishwa)
Silicon-glass anodic bonding (Hell, Erwin)
Inducing air flow (Noel Cherowbrier)
BSOI wafers needed (sandra)
guidance required (om)
sir regarding an under water comm.system (srkvadali)
Etch rate of Cu in BHF (Frank Rasmussen)
looking for PNN-PZT etchant (choe)
BSOI wafers needed (Lawlor, Chris)
RE: origin of the term "MEMS" (John Maloney)
BCB dulition (Michael Töpper)
Etch rate of Cu in BHF (Kirt & Erika Zipf-Williams)
Silicon-glass anodic bonding (BRAD JOHNSON)
BSOI wafers needed (Kenneth Smith)
Si3N4 Dry etch with good selectivity (Jun Chen)
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