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  • Residual stress in Silicon nitride and oxide-reg (Venkataragavalu Sivagnanam)
  • RIE of sub-micron Si structures (Josef Kouba)
  • Mask for concentrated HF (Matthieu Gaudet)
  • Electrodes on SU8 or PDMS (NIU Xize)
  • Fiber/material supplier (Ingvald Bardsen)
  • Aluminum Oxide etchant (Aamer Mahmood)
  • Silver reflective layer (Edward Keough)
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