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MEMS technology

Programmable synchronization enhanced MEMS resonant accelerometer
Our comprehensive scheme provides a general and powerful solution for performance enhancement of any microelectromechanical system (MEMS) resonant sensor, thereby enabling a wide spectrum of ...
Nature: 2020-07-27 - MEMS technology
Electronic phase shift measurement for the determination of acoustic wave DOA using single MEMS biomimetic sensor
MEMS acoustic sensors have been developed to mimic the highly-accurate sound-locating system of the Ormia ochracea fly, which detects sound wavelengths much larger than its hearing organ.
Nature: 2020-07-29 - MEMS technology
Microstructure chews on red blood cells
The blood cells travel on, regain their former shape and appear unharmed. "We've shown that we can create a micromachine that interacts at the scale of cells," says Sandia researcher Murat Okandan. "We've created a demonstration tool with very flexible ...
Design News: 2020-07-22 - MEMS technology

MEMS business

MEMS design automation tool models wider range of geometries
For engineers designing and integrating for microelectromechanical systems (MEMS) devices such as motion sensors, microphones, timing devices and energy harvesters into other systems and circuits, Coventor, a Lam Research company, has released a new ...
Embedded: 2020-07-20 - MEMS business
Imec sees five semiconductor trends for the 20s decade
Such high-density connections leverage the full potential of through-Si via technology and enable >16x higher 3D interconnect densities between die or between dies and a Si-interposer. This allows for a strongly reduced SoC area requirement for the HBM I/O ...
Electronics Weekly: 2020-07-27 - MEMS business


thumbnailWaterloo Institute for Nanotechnology working to spray away COVID
That’s the idea behind an anti-viral surface coating being developed in a collaborative project between by researchers at The Waterloo Institute for
Toronto Sun: 2020-07-22 - Nanotechnology
Discovery will allow more sophisticated work at nanoscale
The research was also featured on the journal's cover. Researchers led by a University of Houston engineer have reported a new way to stimulate fluid flow at nanoscale by using a small increase in temperature or voltage. (©ACS Applied Nano Materials ...
Nanowerk: 2020-07-28 - Nanotechnology
thumbnailAtomic force microscopy reveals nanoscale dental erosion from beverages
KAIST researchers used atomic force microscopy to quantitatively evaluate how acidic and sugary drinks affect human tooth enamel at the nanoscale level. This novel approach is useful for measuring mechanical and morphological changes that occur over time during enamel erosion induced by beverages.
Medical Xpress: 2020-07-22 - Nanotechnology
thumbnailCompact nanoscale textures reduce contact time of bouncing droplets
Many natural surfaces can rapidly shed water droplets due to their water-repellent functionality. In 1945, scientists Cassie and Baxter linked the water-repellent function of natural surfaces to their surface textures. 2020-07-28 - Nanotechnology
thumbnailResearchers design a nanotechnology-based system that can transport methane at lower pressure and cost
Researchers from the University of Alicante's Advanced Materials Laboratory have created an optimal, low-cost methane storage system. The team, led by UA Professor of Inorganic Chemistry Joaquín Silvestre, 2020-07-24 - Nanotechnology

Featured Periodical

Springer Nature Publishing Releases New Book on MEMS Manufacturing Authored by Dr. Michael Huff, Founder and Director of the MEMS and Nanotechnology Exchange (MNX) at Corporation for National Research Initiatives.

The volume is entitled: Process Variations in Microsystems Manufacturing and covers how to estimate and manage the dimensional and material property variations resulting from the use of micro- and nano-fabrication techniques when designing and developing a microsystems device for production. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations.

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