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MEMS technology

Imaging spectrometer slims down
While a flat grating can be made using a greyscale photolithographic microfabrication technique that only requires a one-time exposure, curved gratings require labour-intensive electron-beam processing, he explains. The researchers tested their new device ...
Physics World: 2020-11-23 - MEMS technology

MEMS business

PillarHall test chip able to analyse 3D thin film structures
It can be used to measure the conformality of the thin film process, i.e. the ability to coat a 3D object evenly. "The PillarHall disposable test chip can be used to compare different 3D thin film processes and reactors. The method is exceptional ...
New Electronics: 2020-11-24 - MEMS business
Thorlabs swept-source OCT system is based on MEMS-VCSEL technology
It is based on MEMS-VCSEL technology and includes scanning electronics, an interferometer with a balanced detector, and control software.
laserfocusworld.com: 2020-11-25 - MEMS business

Nanotechnology

thumbnailResearchers create nanoscale slalom course for electrons
A research team led by professors from the Department of Physics and Astronomy have created a serpentine path for electrons, imbuing them with new properties that could be useful in future quantum devices.
Phys.org: 2020-11-25 - Nanotechnology
thumbnailShining a light on nanoscale dynamics
Maximilians-Universit√§t M√ľnchen (LMU Munich) and the University of Regensburg have successfully demonstrated that ultrashort electron pulses experience a quantum mechanical phase shift through their interaction with light waves in nanophotonic materials,
Phys.org: 2020-11-24 - Nanotechnology
Nanoscale Thermal Analysis for Polyphasic Polymers
Until a development in the production of nanoscale thermal probes improved for atomic force microscopy (AFM) by Prof. William King of the University of Illinois at Urbana-Champaign [2], this technique was restricted to micron scale resolution. These probes ...
AZoNano: 2020-11-26 - Nanotechnology

Featured Periodical

Springer Nature Publishing Releases New Book on MEMS Manufacturing Authored by Dr. Michael Huff, Founder and Director of the MEMS and Nanotechnology Exchange (MNX) at Corporation for National Research Initiatives.

The volume is entitled: Process Variations in Microsystems Manufacturing and covers how to estimate and manage the dimensional and material property variations resulting from the use of micro- and nano-fabrication techniques when designing and developing a microsystems device for production. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations.

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