Hi
Have you tried adding silicon to your TMAH solution? might make your
solution more stable,
at least it increases the selectivity.
Regards
Tobias
-----Original Message-----
From: mems-talk-bounces+tobias.kramer=epfl.ch@memsnet.org
[mailto:mems-talk-bounces+tobias.kramer=epfl.ch@memsnet.org]On Behalf Of
Sriram Akella
Sent: Thursday, May 08, 2003 6:03 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Thin Membrane etching
Hi Everyone,
I am trying to etch 2 micron thick membrane. I am
using TMAH as the etchant, but the etchrate of TMAH
maintained at 80C is varying a lot.
Can anyone suggest a procedure that is reproduce able
to a fairly large extent.
regards,
sriram
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