Hi

Have you tried adding silicon to your TMAH solution? might make your
solution more stable,
at least it increases the selectivity.

Regards
Tobias

-----Original Message-----
From: mems-talk-bounces+tobias.kramer=epfl.ch@memsnet.org
[mailto:mems-talk-bounces+tobias.kramer=epfl.ch@memsnet.org]On Behalf Of
Sriram Akella
Sent: Thursday, May 08, 2003 6:03 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Thin Membrane etching


Hi Everyone,

   I am trying to etch 2 micron thick membrane. I am
using TMAH as the etchant, but the etchrate of TMAH
maintained at 80C is varying a lot.

 Can anyone suggest a procedure that is reproduce able
to a fairly large extent.

regards,
sriram

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