Sriram.

Can you give us a few more details. What is the membrane made of and what are
the steps you are using to make it.

Thanks
David Springer


 >>  Hi Everyone,

 >>  I am trying to etch 2 micron thick membrane. I am
 >>  using TMAH as the etchant, but the etchrate of TMAH
 >>  maintained at 80C is varying a lot.

 >>  Can anyone suggest a procedure that is reproduce able
 >>  to a fairly large extent.

 >>  regards,
 >>  sriram

 >>  _______________________________________________
 >>  MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
 >>  options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
 >>  Hosted by the MEMS Exchange, providers of MEMS processing services.
 >>  Visit us at http://www.memsnet.org/