Parylene might be an option:  http://www.scscookson.com/applications/mems.cfm

Madan.

At 08:15 AM 5/16/2003 -0700, you wrote:
>Dave Kharas 

___________________________________________________________

K.V.Madanagopal, Ph.D.
Senior Research Associate
Alliance for Nanomedical Technologies
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Cornell University
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Fax:607-255-8741
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