Hi,
ths is dlee from Ut austin. I try to bond two piece of PDMS layer toghter
with O2 RIE. The paramter is  O2 10sccm, 45 mtorr, 100watts. but bonding
result is bad. I also try O2 20sccm, 70 mtorr and 75 watts, also the result
is noy good. In my case, i need high strength bonding, at the least the
bonding can stand 20-30 psi. I read some paper. It was said O2 RIE bonding
can stand 50psi pressure. I am not sure what is wrong with my process.
Anybody has suceed to achieve such good bonding strength (>30psi), any
suggestion will be appreciated.

Thanks
Dlee
Mechanical Engineering Department
The University of Texas At Austin

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