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MEMSnet Home: MEMS-Talk: Ni/7%V sputtering
Ni/7%V sputtering
2003-08-03
David Ovrokzky
2003-08-04
PRAMOD GUPTA
2003-08-10
TEL Klaus Beschorner
Ni/7%V sputtering
David Ovrokzky
2003-08-03
Hello everybody,
Where can I find the recommended recipe for Ni/7%V target in MRC sputter.
I have tried searching the web, but without successes.

I appreciate any help.

David Ovrutsky
Process Engineer
Chip Size Packaging



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