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MEMSnet Home: MEMS-Talk: Ni/7%V sputtering
Ni/7%V sputtering
2003-08-03
David Ovrokzky
2003-08-04
PRAMOD GUPTA
2003-08-10
TEL Klaus Beschorner
Ni/7%V sputtering
PRAMOD GUPTA
2003-08-04
David

You can contact Applied Materials Inc (PVD Al-Plug Division) as they have done a
lot of work in Process/Technology Development for 200mm & 300mm Ni-V technology.

David Ovrokzky  wrote:

Hello everybody,
Where can I find the recommended recipe for Ni/7%V target in MRC sputter.
I have tried searching the web, but without successes.

I appreciate any help.

David Ovrutsky
Process Engineer
Chip Size Packaging



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(Pramod Gupta)

20800 Valley Green Dr., # 445

Cupertino, CA 95014

Phone: (408) 253-1646

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