Anshu,
I am not aware of a quantitative measurement, but index of refraction
is a good qualitative measure of density for transparent films. A good
spectroscopic ellipsometer will provide an accurate measure of index and
absorption. Index will drop from theoretical values as film densities
decrease. I have also used this measurement to monitor stochiometery of
evaporated and reactively sputtered oxide films. What films are you
looking at and do you need quantitative measurements?
John Fijol
-----Original Message-----
From: mems-talk-bounces+jfijol=confluentphotonics.com@memsnet.org
[mailto:mems-talk-bounces+jfijol=confluentphotonics.com@memsnet.org] On
Behalf Of anshu mehta
Sent: Wednesday, August 06, 2003 4:08 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Density measurement
Hi!
Does anyone have suggestions on ways to measure
density for thin films?
Thanks,
Anshu.
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