If you have a crystal monitor in your deposition system, you could compare
the crystal monitor reading to a thickness measurement done on a step edge
using a profilometer. You'd have to have a reasonable guess at the acoustic
impedance - I don't know how much uncertainty that would introduce if there
was an error in that parameter.
David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
-----Original Message-----
From: mems-talk-bounces+nemeth=sophiawireless.com@memsnet.org
[mailto:mems-talk-bounces+nemeth=sophiawireless.com@memsnet.org]On
Behalf Of anshu mehta
Sent: Wednesday, August 06, 2003 4:08 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Density measurement
Hi!
Does anyone have suggestions on ways to measure
density for thin films?
Thanks,
Anshu.
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