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MEMSnet Home: MEMS-Talk: need thin film SOI wafers
need thin film SOI wafers
2003-08-07
Marcus Siegert
2003-08-08
Michaela Wullinger
need thin film SOI wafers
Marcus Siegert
2003-08-07
Hi MEMS-People:

I am looking for thin-film-soi-wafers.

Following specification is required:

Device-layer:
Diameter: 150 mm
Type: n-type
Orientation:<100>
Thickness: 300 nm - 500 nm
Resistivity: 0.3 (let me know what range you can offer!!!)

BOX:
2000 - 5000 angstrom, please specify!!!)

Handle:
Dopant: any
Orientation: any
Resistivity: any
Thickness: > 400 µm
Flatness: <5µm

All other specification are N/S.

Quantity: 25 pcs.

Please let me know who can supply such specification???

Thanks and regards,

Marcus Siegert
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