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MEMSnet Home: MEMS-Talk: to etch out Cr from top surface
to etch out Cr from top surface
2003-10-07
kui-xiang_ma@agilent.com
2003-10-07
Michael D Martin
to etch out Cr from top surface
kui-xiang_ma@agilent.com
2003-10-07
Hi all,

I look forward to hearing your comments and suggestion how to get rid of Cr from
top surface of my sample.  My ceramic substrate is deposited with Cr and Pt,
respectively.  Due to either process or post annealing, Cr migrates to surface
and gives more than 10% concentration.  The surface Cr brings me with serious
wetting problem, so that I need to reduce Cr concentration on the surface as
much as possible.

Appreciate it very much if any one could recommend me what good solutions are,
together with process conditions / parameters.  Thanks so much for your kind
help!

Best regards,
Kasey Ma


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