Hi Kasey,
   Below 400C you might try Cr/Cu/Co/Au, see J/ Appl. Phys. 70(3) 1374
(01 Aug 1991). While I'm no expert, I've also heard that TiN might work.


Good Luck,
    Mike


>>> [email protected] 10/7/2003 5:07:14 AM >>>
Hi all,

I look forward to hearing your comments and suggestion how to get rid
of Cr from top surface of my sample.  My ceramic substrate is deposited
with Cr and Pt, respectively.  Due to either process or post annealing,
Cr migrates to surface and gives more than 10% concentration.  The
surface Cr brings me with serious wetting problem, so that I need to
reduce Cr concentration on the surface as much as possible.

Appreciate it very much if any one could recommend me what good
solutions are, together with process conditions / parameters.  Thanks so
much for your kind help!

Best regards,
Kasey Ma


_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk

Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/