Etch rate of glass with RIE is highly dependent on power. I've seen
reasonable results with ~500watts, 90% CF4/O2 or even CHF3/O2, at low
pressures of ~ 10mT.
Mubeen Almoustafa
Process Engineer
Trion Technology
-----Original Message-----
From: mems-talk-bounces+mubeen=triontech.com@memsnet.org
[mailto:mems-talk-bounces+mubeen=triontech.com@memsnet.org]On Behalf Of
Leonard81@vodafone.it
Sent: Tuesday, October 21, 2003 2:46 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] glass RIE etching
Importance: High
Can anyone send me some parameters and/or particular description of glass
RIE etching?
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