Glass, such as Pyrex, can be etched with SF6 in a RIE system. A
pressure of ~70 mTorr should suffice. Chrome can be used as a mask
(photoresist may not survive, as the etch rate may be quite low.) The
optimum power is system dependent.
Roger Shile
-----Original Message-----
From: mems-talk-bounces+rshile=nanoink.net@memsnet.org
[mailto:mems-talk-bounces+rshile=nanoink.net@memsnet.org] On Behalf Of
Leonard81@vodafone.it
Sent: Tuesday, October 21, 2003 2:46 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] glass RIE etching
Importance: High
Can anyone send me some parameters and/or particular description of
glass RIE etching?
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