Hi Yilei,

        As far as I know with 20:1 H2O:HF diluted solution, it does not
have any detectable attack on Cr from room temp. to about 50degC. You can
try it for yourself. It's a good starting point.


Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
iwchan@venus.uwaterloo.ca
http://www.ece.uwaterloo.ca/~a-sidic


On Sun, 2 Nov 2003, Yilei Zhang wrote:

> Hi all:
> Can anyone tell me whether chrome layer can survive in HF etching sio2? if
> not, is there any other SiO2 etchant will not damage Chrome? thanks.
>
> Regards,
> Yilei Zhang
>
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>
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