> Can anyone tell me whether chrome layer can survive in HF etching sio2? if
> not, is there any other SiO2 etchant will not damage Chrome? thanks.
>
> Regards,
> Yilei Zhang

Our measured etch rate in 5:1 BHF is < 0.3 nm/min for sputtered Cr and 0
nm/min for evaporated Cr,
so yes, Cr will survive.
    --Kirt Williams, Ph.D.   consultant