depends on the size of the structures. you will need to test it,
probably with only a small amount of N2 at first, maybe none. your
biggest problem will be drying (perhaps that's what you meant by N2?)
-steven
Yilei Zhang wrote:
>Hello all:
>Can I use DI water+N2 in a tank to rinse wafer with small structures? Will it
>damage the structure, for example, will the cantilevers break during the
>rinse? thanks.
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>Regards,
>Yilei Zhang
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