hello,
i use DI water and dry off with N2 wafers with small cantilevers. My levers are
~125um long and ~3um Thick. i never have a problem -just make sure that if you
are rinsing them in a dump rinser that the water flow is not too fast (run a
dummy wafer first). if you are hand rinsing them just do it slowly.
thanks
Lenny Fuste
Production Engineer
Veeco Probes
-----Original Message-----
From: Yilei Zhang [mailto:ylzhang@iastate.edu]
Sent: Tuesday, November 18, 2003 5:24 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] how to rinse small structure?
Hello all:
Can I use DI water+N2 in a tank to rinse wafer with small structures? Will it
damage the structure, for example, will the cantilevers break during the
rinse? thanks.
Regards,
Yilei Zhang
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