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MEMSnet Home: MEMS-Talk: Help: how to reflow SU-8 after crosslinking
Help: how to reflow SU-8 after crosslinking
2003-12-02
Xiaohui Li
2003-12-03
franCk
2003-12-02
Brubaker Chad
2003-12-04
Michael L
Help: how to reflow SU-8 after crosslinking
franCk
2003-12-03
Hi XiaoHui,
according to http://aveclafaux.freeservers.com/su-8.html#top the Su8 can
not be reflown  in a general case - it degrades before it could (it
turns black)... (21h at the 210C did not achieve anything and at 220C it
degrades...)

And I know it contradicts a bit what 'glass transition temperature'
means that should imply that SU8 is a thermoplastic polymer (but isn't
epoxy a thermosetting polymer anyway?) - at any rate the experimental
evidence is there but I wish someone can prove that wrong and could
reflow the SU8...

(I suspect the reflow condition are for the pure epoxy resin, and not
for SU8...)

Franck
-----Original Message-----
From: Xiaohui Li [mailto:xiaohui.li@yale.edu]
Sent: mardi 2 décembre 2003 13:00
To: mems-talk@memsnet.org
Subject: [mems-talk] Help: how to reflow SU-8 after crosslinking


Hi,

I am trying to reflow SU-8 after cross-linking.  Looks that SU-8 is very

difficult to reflow after cross-linked although it has a glass
transition
temperature.  Did anyone reflow SU-8 before?  Can I get some
suggestions?

I really appreciate any suggestions.


Xiaohui


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