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MEMSnet Home: MEMS-Talk: Help: how to reflow SU-8 after crosslinking
Help: how to reflow SU-8 after crosslinking
2003-12-02
Xiaohui Li
2003-12-03
franCk
2003-12-02
Brubaker Chad
2003-12-04
Michael L
Help: how to reflow SU-8 after crosslinking
Michael L
2003-12-04
Hi Xiaohui

I think SU-8 generally tends to degrade (i.e. molecular bonds breaking)
before the temperature is sufficient to cause it to reflow. I think the
degradation temperature is around 300 Deg C. So you could try to heat to
between 250-280 Deg C for a period of time to see what happens. Let me know
if you get reflow.

Regards,

Michael

>
>Hi,
>
>I am trying to reflow SU-8 after cross-linking.  Looks that SU-8 is very
>difficult to reflow after cross-linked although it has a glass transition
>temperature.  Did anyone reflow SU-8 before?  Can I get some suggestions?
>
>I really appreciate any suggestions.
>
>
>Xiaohui
>

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