Hi All,
When people use Cr/Au as the etch mask for wet etching of glass, what kind of
deposition method did they use? I used resistive evaporation method and found
the metal film collapsed and gave way to the etchant in a very short time. I
suspect the film adhesion is not that good. Maybe sputtering will do a better
job? Anybody had experience with this situation? Any thoughtful input would be
appreciated.
Thanks,
Tom Fan