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MEMSnet Home: MEMS-Talk: RE: MEMS wafer dicing
RE: MEMS wafer dicing
2003-12-08
Qingwei Mo
2003-12-09
Greg Ortiz
2003-12-10
Kirt Williams
2003-12-11
Qingwei
RE: MEMS wafer dicing
Qingwei Mo
2003-12-08
Hi,

I am looking for some suggestions for MEMS wafer dicing, either suitable
techniques or mature service provider. What I am working on is 4 inch wafer
made by wafer bonding and bulk micromachining. The device can not be exposed
to water as you know. I have tried laser dicing; the results are not very
good.

I really appreciate your suggestions and information.

Best regards,

Qingwei



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