We used an asher for some of our cleaning needs.

Vonda
----- Original Message -----
From: "Jen Robertson" 
To: 
Sent: Friday, December 19, 2003 5:04 PM
Subject: [mems-talk] cleaning small chips


> Hi-
>
> Is there a good way to clean small (<5mm square) silicon chips? Our chips
have lots of visiable residues after the dicing process, either from the
dicing tapes or wafer dusts. We have tried soaking in many different
solvents but cannot seem to get rid of them. These chips have fragile MEMS
structures on them and will break if we use ultrasonic agitation. Any
suggestion would be greatly appreciated. Thanks!
>
>
> Jen
>
>
> ---------------------------------
> Do you Yahoo!?
> Free Pop-Up Blocker - Get it now
>