Dear Mems-Talk Users,
Is YBCO a contaminant material for the III-V and II-VI processing
environement ? We plan to sputter YBCO in a chamber used for GaAs and
HgCdTe processing. May any residue of YBCO become harmful to these
materials ?
Thank you for your answers,
Best regards,
Oray Orkun Cellek
Research Assistant, Ph. D. Student
Electrical & Electronics Engineering Department
Middle East Technical University
06531 Ankara
Turkey
Tel : +90 312 210 4579
Fax : +90 312 210 1261
e-mail : [email protected]
