Hi all,
I would like to sputter Cu (thickness of about 2 microns) . However i
understand that i need to modify my sputtering parameters to do this.
Currently my parameters are :-
Pr(base)= 5 * 10 ^(-5) torr
Pr (chamber)= 30 m torr
Power = 300 W
Does anybody have any experience in sputtering thick Copper.Pls let me know.
Thanks in advance,
Dipankar Ghosh
____________________________________________________________
Free Poetry Contest. Win $10,000. Submit your poem @ Poetry.com!
http://ad.doubleclick.net/clk;6750922;3807821;l?http://www.poetry.com/contest/co
ntest.asp?Suite=A59101