Yes i have sputtering experience using copper for pyrex glass 7740. By the way
do u have any jobs for a post of semiconductor engineering in singapore? Looking
forward to hear from you. Thanks
________________________________
From: mems-talk-bounces+vincent_79=pmail.ntu.edu.sg@memsnet.org on behalf of
Dipankar Ghosh
Sent: Tue 12/23/2003 2:41 AM
To: General MEMS discussion
Subject: [mems-talk] Sputtering of copper
Hi all,
I would like to sputter Cu (thickness of about 2 microns) . However i
understand that i need to modify my sputtering parameters to do this.
Currently my parameters are :-
Pr(base)= 5 * 10 ^(-5) torr
Pr (chamber)= 30 m torr
Power = 300 W
Does anybody have any experience in sputtering thick Copper.Pls let me know.
Thanks in advance,
Dipankar Ghosh
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