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MEMSnet Home: MEMS-Talk: crucible for Ti
crucible for Ti
2003-12-22
"Lee, Duhyun"
2003-12-23
M.Leonard@hw.ac.uk
2003-12-23
Blunier, Stefan
2003-12-23
garber@engr.uconn.edu
crucible for Ti
M.Leonard@hw.ac.uk
2003-12-23
We have been evaporating Ti in our system for 3 years without any crucible
and any problems. I guess it depend upon what purity you are needing - we
are not worried as we just use as a seed layer

Mark Leonard


On Mon, 22 Dec 2003 17:24:56 -1200, "Lee, Duhyun"  wrote:

>
>
> <!--startrecall--><img
> src="http://mail.skku.edu/mail/write/mail_recall.php?
f_headindex=1573594-200302205168-mems-talk@memsnet.org"><!--
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>
> What kind of crucible can I use for e-beam evaporation of Ti?
> As far as I know, TiC is recommended, but I don't have it.
>
> I have Al2O3, Mo, W, and graphite crucibles.
>
> please advice me...
>
>
> Lee, Duhyun
>
> ========================================
> duhyun@skku.edu
> Technology Innovation Center(TIC)
> Dep. of Advanced Materials Eng.
> Sungkyunkwan University, KOREA
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