Hi Duhyun
According to the "Edwards" catalogue carbon crucibles are recommended
for Ti.
greetings
Stefan
-----Original Message-----
From: mems-talk-bounces+blunier=imes.mavt.ethz.ch@memsnet.org
[mailto:mems-talk-bounces+blunier=imes.mavt.ethz.ch@memsnet.org] On
Behalf Of "Lee, Duhyun"
Sent: Dienstag, 23. Dezember 2003 06:25
To: mems-talk@memsnet.org
Subject: [mems-talk] crucible for Ti
<!--startrecall--><img
src="http://mail.skku.edu/mail/write/mail_recall.php?f_headindex=15
73594-200302205168-mems-talk@memsnet.org"><!--endrecall-->
What kind of crucible can I use for e-beam evaporation of Ti? As far as
I know, TiC is recommended, but I don't have it.
I have Al2O3, Mo, W, and graphite crucibles.
please advice me...
Lee, Duhyun
========================================
duhyun@skku.edu
Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
Fax +82-31-290-5644
========================================
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/