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MEMSnet Home: MEMS-Talk: crucible for Ti
crucible for Ti
2003-12-22
"Lee, Duhyun"
2003-12-23
M.Leonard@hw.ac.uk
2003-12-23
Blunier, Stefan
2003-12-23
garber@engr.uconn.edu
crucible for Ti
Blunier, Stefan
2003-12-23
Hi Duhyun
According to the "Edwards" catalogue carbon crucibles are recommended
for Ti.
greetings
Stefan

-----Original Message-----
From: mems-talk-bounces+blunier=imes.mavt.ethz.ch@memsnet.org
[mailto:mems-talk-bounces+blunier=imes.mavt.ethz.ch@memsnet.org] On
Behalf Of "Lee, Duhyun"
Sent: Dienstag, 23. Dezember 2003 06:25
To: mems-talk@memsnet.org
Subject: [mems-talk] crucible for Ti




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What kind of crucible can I use for e-beam evaporation of Ti? As far as
I know, TiC is recommended, but I don't have it.

I have Al2O3, Mo, W, and graphite crucibles.

please advice me...


Lee, Duhyun

========================================
duhyun@skku.edu
Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
Fax +82-31-290-5644
========================================
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