We use toluene or a straight-chain alkane, like heptane.
Chris
On Thursday, July 22, 2004, at 07:47 am, Ralph Hinkley wrote:
> Dear MEMS colleagues,
>
> I'm having difficulties removing the high vacuum grease.
> High vacuum grease is used in attaching small samples to a dummy wafer
> for Si deep etch process.
> After the deep etch process, I managed to detach the samples in
> acetone,
> but totally removing the grease with acetone seems impossible.
> Can anyone shed some light on?
> I'm using Dow corning high vacuum grease.
>
> Regards.
>
> Ji.
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
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