-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Jack Mulligan
Sent: Thursday, July 22, 2004 10:43 AM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] HIgh vacuum grease removal
Ralph -
Acetone probably will not do a very good job of removing your greases.
We
have a patented technology we have used to clean numerous MEM, Semi and
relate parts. It works with any fluid with a vapor pressure.
I wonder if adding an electrostatic chuck to Ji's etcher would be
cheaper.