Dear MEMS talkers,
I'm new in e-beam lithography(EBL) and looking for the way to make patterns
on quartz wafer.
The process what I want to do is
1. PMMA coating on bare quartz
2. EBL
3. metal lift-off
The problem is the EBL. I have to focus on the quratz wafer and draw
sub-micron pattern.
Due to the charge-up, I cannot do anything.
Please advice me
Lee, Duhyun